X鈥揹ucer鈩?/div>
SILICON
PRESSURE SENSORS
PIN NUMBER
Gnd
+Vout
VS
5
6
7
8
N/C
N/C
N/C
N/C
2
Value
400
1000
鈥?40 to +125
鈥?40 to +125
Unit
kPa
kPa
擄C
擄C
3
4
MAXIMUM RATINGS
(TC = 25擄C unless otherwise noted)
Rating
Overpressure(1) (P1 > P2)
Burst Pressure(1) (P1 > P2)
Storage Temperature
Operating Temperature
VS
3
Symbol
Pmax
Pburst
Tstg
TA
*
Vout
NOTE: Pins 5, 6, 7, and 8 are not
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
PINS 5, 6, 7 AND 8 ARE NO CONNECTS
The MPXT4100A/4101A/4105A series piezoresistive
transducer is a state鈥搊f鈥搕he鈥揳rt, monolithic, signal con-
ditioned, silicon pressure sensor. This sensor, with its pat-
ented transducer, combines advanced micromachining
techniques, thin film metallization, and bipolar semicon-
ductor processing to provide an accurate, high level analog
output signal that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry
integrated on a pressure sensor chip.
Figure 1. Fully Integrated Pressure Sensor Schematic
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1