MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Freescale Semiconductor, Inc.
Order this document
by MPXA6115A
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On- Chip Signal Conditioned,
Temperature Compensated
and Calibrated
Motorola鈥檚 MPXA6115A/MPXH6115A series sensor integrates on--chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and temperature
compensation. The small form factor and high reliability of on--chip integration make the
Motorola pressure sensor a logical and economical
choice for the system designer.
SUPER SMALL OUTLINE
The MPXA6115A/MPXH6115A series piezoresistive
PACKAGE
transducer is a state--of--the--art, monolithic, signal
conditioned, silicon pressure sensor. This sensor
combines advanced micromachining techniques, thin
film metallization, and bipolar semiconductor processing
to provide an accurate, high level analog output signal
that is proportional to applied pressure.
MPXH6115A6U
Figure 1 shows a block diagram of the internal
CASE 1317
circuitry integrated on a pressure sensor chip.
Features
鈥?/div>
Improved Accuracy at High Temperature
鈥?/div>
Available in Small and Super Small Outline
Packages
鈥?/div>
1.5% Maximum Error over 0擄 to 85擄C
鈥?/div>
Ideally suited for Microprocessor or
Microcontroller--Based Systems
鈥?/div>
Temperature Compensated from --40擄 to +125擄C
鈥?/div>
Durable Thermoplastic (PPS) Surface Mount
Package
Application Examples
鈥?/div>
Aviation Altimeters
鈥?/div>
Industrial Controls
鈥?/div>
Engine Control/Manifold Absolute Pressure (MAP)
鈥?/div>
Weather Station and Weather Reporting Device
Barometers
V
S
MPXA6115A
MPXH6115A
SERIES
INTEGRATED
PRESSURE SENSOR
15 to 115 kPa (2.2 to 16.7 psi)
0.2 to 4.8 Volts Output
Freescale Semiconductor, Inc...
SMALL OUTLINE PACKAGE
MPXA6115A6U
CASE 482
MPXH6115AC6U
CASE 1317A
MPXA6115AC6U
CASE 482A
J
PIN NUMBER
1
2
3
4
N/C
V
S
Gnd
V
out
5
6
7
8
N/C
N/C
N/C
N/C
MPXV5004G7U
CASE 482B
NOTE: Pins 1, 5, 6, 7, and 8 are
internal device connections. Do not
connect to external circuitry or
ground. Pin 1 is denoted by the
chamfered corner of the package.
MPXV5004GC7U
CASE 482C
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PIN NUMBER
V
out
1
2
3
4
N/C
V
S
Gnd
V
out
5
6
7
8
N/C
N/C
N/C
N/C
PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor
Schematic
REV 2
NOTE: Pins 1, 5, 6, 7, and 8 are
internal device connections. Do not
connect to external circuitry or
ground. Pin 1 is denoted by the notch
in the lead.
Motorola Sensor Device Data
錚?/div>
Motorola, Inc. 2003
MPXA6115A MPXH6115A SERIES
For More Information On This Product,
1
Go to: www.freescale.com
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