鈥?/div>
Barometer
VS
3
SERIES
OPERATING OVERVIEW
INTEGRATED
PRESSURE SENSOR
15 to 115kPa
(2.18 to 16.7 psi)
0.2 to 4.8 Volts Output
BASIC CHIP CARRIER
ELEMENT
CASE 867鈥?8, STYLE 1
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PORT OPTION
CASE 867B鈥?4, STYLE 1
1
Vout
NOTE: Pin 1 is the notched pin.
PIN NUMBER
PINS 4, 5 AND 6 ARE NO CONNECTS
1
2
3
Vout
Grd
VS
4
5
6
N/C
N/C
N/C
Figure 1. Fully Integrated Pressure Sensor Schematic
NOTE: Pins 4, 5, and 6 are internal
device connections. Pin 1 is noted by
the notch in the Lead. Do not
connect to external circuitry or
ground.
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
REV 3
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1