X鈥揹ucer鈩?/div>
SILICON
PRESSURE SENSORS
DIFFERENTIAL
PORT OPTION
CASE 350鈥?5
Style 1
Pin Number
1
Ground
2
+ Vout
Value
2800
5000
鈥?40 to +125
鈥?40 to +125
3
VS
4
鈥?Vout
Unit
kPa
kPa
擄C
擄C
MAXIMUM RATINGS
Rating
Overpressure(8) (P1 > P2)
Burst Pressure(8) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Pmax
Pburst
Tstg
TA
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X鈥揹ucer is directly proportional to the
differential pressure applied.
The output voltage of the differential or gauge sensor increases with
increasing pressure applied to the pressure side (P1) relative to the vacuum
side (P2). Similarly, output voltage increases as increasing vacuum is applied to
the vacuum side (P2) relative to the pressure side (P1).
Figure 1 shows a block diagram of the internal circuitry on the stand鈥揳lone
pressure sensor chip.
VS
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
X鈥揹ucer
SENSING
ELEMENT
2
4
Vout+
Vout鈥?/div>
1
X鈥揹ucer is a trademark of Motorola, Inc.
GND
Figure 1. Temperature Compensated
Pressure Sensor Schematic
漏
Motorola Sensor Device Data
Motorola, Inc. 1996
1
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