MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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by MMAS40G10D/D
Micromachined Accelerometer
鹵40g
The MMAS40G family of silicon capacitive, micro鈥搈achined accelerometers
features integral signal amplification, signal conditioning, a 4鈥損ole low鈥損ass
filter and temperature compensation. Zero鈥揋 offset, full scale span and filter
roll鈥搊ff are factory set and require no external passives. A calibrated self鈥搕est
feature mechanically displaces the seismic mass with the application of a digital
self鈥搕est signal.
The MMAS40G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (G鈥揷ell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The G鈥揷ell is
sealed at the wafer level, creating a particle鈥揻ree environment. The G鈥揷ell
features built鈥搃n damping and over鈥搑ange stops to protect it from mechanical
shock.
MMAS40G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
Features
鈥?/div>
Minimum Full Scale Measurement
鹵
40g
鈥?/div>
Calibrated, True Self鈥揟est
鈥?/div>
Standard 16鈥揚(yáng)in Plastic DIP package
鈥?/div>
Senses Perpendicular to the Printed Circuit Board
鈥?/div>
Integral Signal Conditioning and 4鈥揚(yáng)ole Filter
鈥?/div>
Linear Output
鈥?/div>
Robust, High Shock Survivability
1
2
3
4
5
6
MMAS40G10D
MICROMACHINED
ACCELEROMETER
鹵
40g
11 10 9
13 12
15 14
16
7 8
5 6
3 4
1 2
DIP PACKAGE
CASE 648C鈥?3
PIN NUMBER (DIP)
N/C (1)
N/C (1)
N/C (1)
Self鈥揟est
Output
Bypass (2)
GND
VS (2)
9
10
11
12
13
14
15
16
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
SIMPLIFIED BLOCK DIAGRAM
+
+
8
+
VS
7
8
4
SELF鈥揟EST
g
G鈥揅ELL
A
6
BYPASS
NOTES:
1. Internal connections. All N/C should be
tied to gnd, except pin 11 which must be
tied to pin 8.
2. Bypass to ground with 0.1
碌F
ceramic
capacitor for specified system perfor-
mance.
LOW鈥揚(yáng)ASS FILTER
TEMPERATURE
COMPENSATION
5
OUTPUT
7
GND
REV 1
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1
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英文版
MICROMACHINED ACCELEROMETER 【40g AMPLIFIED
-
英文版
MICROMACHINED ACCELEROMETER 【40g AMPLIFIED
MOTOROLA [...
-
英文版
MICROMACHINED ACCELEROMETER 【40g
-
英文版
MICROMACHINED ACCELEROMETER 【40g
MOTOROLA [...
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