DATA SHEET
BT(Back-thinned)-CCD
Video Camera
C8000-20
The C8000 camera series employs an ultra high sensitive
back-thinned CCD sensor made by Hamamatsu. Espe-
cially in the UV, DUV and VUV wavelength ranges, the
C8000 series offers extremely high sensitivity never be-
fore realized by other scientific CCDs.
Spectral Response Characteristic of CCD chip*
100
FEATURES
q
Extremely high UV, DUV and VUV
sensitivity
q
Quantum Efficiency of CCD chip
(This is typical, not guaranteed. )
(This is typical, not guaranteed. )
Quantum Efficiency (%)
Excimer Laser
Wavelength (nm)
Quantum
Efficiency(%)
Without sapphire
window
With sapphire
window
F
2
157
84
34 **
ArF
193
57
42 **
KrF
248
69
55 **
80
60
**Calclated value
40
APPLICATIONS
q
Beam Diagnostics of Stepper
Excimer Lasers: F
2
(157 nm), ArF
(193 nm), KrF (248 nm)
200
300
400
500
600
700
800
900 1000 1100 1200
20
0
100
Wavelength (nm)
* Without sapphire window. The spectral response with sapphire
window is decrease by the transmittance.
q
Development of UV optics
1
2
