MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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by XMMAS500G/D
Preliminary Information
XMMAS500G10D
XMMAS500G10S
MICROMACHINED
ACCELEROMETER
鹵
500g AMPLIFIED
Micromachined Accelerometer
鹵500g
Amplified
The MMAS500G family of silicon capacitive, micro鈥搈achined accelerome-
ters features integral signal amplification, signal conditioning, a 4鈥損ole
low鈥損ass filter and temperature compensation. Zero鈥揋 offset, full scale span
and filter roll鈥搊ff are factory set and require no external passives. A calibrated
self鈥搕est feature mechanically displaces the seismic mass with the application
of a digital self鈥搕est signal. The device is offered in either of two plastic
packages, thereby accommodating various axis orientation requirements.
The MMAS500G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (G鈥揷ell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The G鈥揷ell is
sealed at the die level, creating a particle鈥揻ree environment. The G鈥揷ell
features built鈥搃n damping and over鈥搑ange stops to protect it from mechanical
shock.
MMAS500G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
Features
鈥?/div>
Full Scale Measurement
鹵
500g
鈥?/div>
Calibrated, True Self鈥揟est
鈥?/div>
Standard 16鈥揚in Plastic DIP
鈥?/div>
Integral Signal Conditioning and 4鈥揚ole Filter
鈥?/div>
Linear Output
鈥?/div>
Robust, High Shock Survivability
1
2
3
4
5
6
7
DIP PACKAGE
CASE 648C鈥?3
SIP PACKAGE
CASE 447鈥?1
PIN NUMBER
N/C (1)
N/C (1)
N/C (1)
Self鈥揟est
Output
Bypass (2)
GND
VS (2)
9
10
11
12
13
14
15
16
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
SIMPLIFIED BLOCK DIAGRAM
+
+
8
+
VS
8
4
SELF鈥揟EST
NOTES:
1. Internal connections. All N/C must
remain floating, except DIP鈥檚 pin
11 which must be tied to pin 8.
2. Bypass to ground with 0.1
碌F
ceramic
capacitor to improve noise performance.
g
G鈥揅ELL
A
6
BYPASS
LOW鈥揚ASS FILTER
TEMPERATURE
COMPENSATION
5
OUTPUT
7
GND
This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice.
漏
Motorola Sensor Device Data
Motorola, Inc. 1995
1
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