Silicon Piezoresistive
Absolute Pressure Sensor
Preliminary Data
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
鈥?High long term stability
鈥?Built in silicon temperature sensor
鈥?Provided for further fabrication, protection cap
Type and
Marking
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Pin Configuration
1
2
3
4
5
6
7
8
Temperature sensor
(typ.
R
25
= 2 k鈩?
Not connected
+
V
IN
; Temperature sensor
鈭?/div>
V
OUT
Capillary tube
Shielding, to be connected
to +
V
IN
鈭?/div>
V
IN
+
V
OUT
Symbol
Pressure Range
0
鈥?/div>
0.6
0
鈥?/div>
1.6
0
鈥?/div>
4
0
鈥?/div>
10
0
鈥?/div>
25
0
鈥?/div>
60
0
鈥?/div>
160
0
鈥?/div>
400
Unit
bar
鈥?/div>
鈥?/div>
鈥?/div>
鈥?/div>
KPY 62-AK
KPY 69-AK
Similar to TO-39-2
Ordering Code
Q62705-K275
Q62705-K276
Q62705-K277
Q62705-K278
Q62705-K279
Q62705-K280
Q62705-K281
Q62705-K282
P
0
鈥?/div>
P
N
Semiconductor Group
1
1998-05-08
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