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MPXT5006D Datasheet

  • MPXT5006D

  • INTEGRATED PRESSURE SENSOR

  • 4頁

  • MOTOROLA   MOTOROLA

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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPXT5006D/D
MPXT5006D
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPXT5006D series piezoresistive transducer is a state鈥搊f鈥搕he鈥揳rt monolithic
silicon pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This sensor combines a
highly sensitive implanted strain gauge with advanced micromachining techniques,
thin鈥揻ilm metallization, and bipolar processing to provide an accurate, high level analog
output signal that is proportional to the applied pressure.
Features
鈥?/div>
Temperature Compensated over 10擄 to 60擄C
鈥?/div>
Ideally Suited for Microprocessor or Microcontroller鈥揃ased Systems
鈥?/div>
Available in Gauge Configurations
TOP PISTON FIT 鈥?SNAP PORT
CASE 473B鈥?1, STYLE 1
VS
3
SERIES
INTEGRATED
PRESSURE SENSOR
0 to 6 kPa (0 to 0.87 psi)
0.2 to 4.7 V OUTPUT
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
TOP PISTON FIT PACKAGE
CASE 473A鈥?1, STYLE 3
Figure 1. Fully Integrated Pressure Sensor Schematic
PIN NUMBER
1
Vout
Gnd
3
4
VS
N/C
2
Symbol
Pmax
Pburst
Tstg
TA
Value
10
60
鈥?30 to +100
+10 to +60
Unit
kPa
kPa
擄C
擄C
MAXIMUM RATINGS(1)
Parametrics
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Storage Temperature
Operating Temperature
NOTE: Pin 4 is an internal device
connection. Do not connect to
external circuitry or ground. Pin 1 is
noted by the notch in the Lead.
1. TC = 25擄C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
漏
Motorola Sensor Device Data
Motorola, Inc. 1997
1

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