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MOTOROLA

Freescale Semiconductor, Inc.

SEMICONDUCTOR TECHNICAL DATA

Order this document

by MPXM2202/D

200 kPa

On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly

accurate and linear voltage output 鈥?directly proportional to the applied pressure. The

sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin鈥揻ilm

resistor network integrated on鈥揷hip. The chip is laser trimmed for precise span and offset

calibration and temperature compensation.

Features

鈥?/div>

Temperature Compensated Over 0擄C to +85擄C

鈥?/div>

Available in Easy-to-Use Tape & Reel

鈥?/div>

Ratiometric to Supply Voltage

鈥?/div>

Gauge Ported & Non Ported Options

Application Examples

鈥?/div>

Pump/Motor Controllers

鈥?/div>

Robotics

鈥?/div>

Level Indicators

鈥?/div>

Medical Diagnostics

鈥?/div>

Pressure Switching

鈥?/div>

Barometers

鈥?/div>

Altimeters

Figure 1 shows a block diagram of the internal circuitry on the stand鈥揳lone pressure

sensor chip.

V

S

3

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

1

GND

MPXM2202

SERIES

Motorola Preferred Device

0 to 200 kPa (0 to 29 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

Freescale Semiconductor, Inc...

MPAK PACKAGE

SCALE 1:1

CASE 1320

SCALE 1:1

CASE 1320A

X-ducer

SENSING

ELEMENT

2

4

V

out+

PIN NUMBER

1

Gnd

+V

out

3

4

V

S

鈥揤

out

2

V

out-

Figure 1. Temperature Compensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the sensor is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,

output voltage increases as increasing vacuum is applied to the vacuum side (P2)

relative to the pressure side (P1).

Preferred

devices are Motorola recommended choices for future use and best overall value.

REV 0

漏

Motorola, Inc. 2001

For More Information On This Product,

Go to: www.freescale.com

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