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MPXL5010G7U Datasheet

  • MPXL5010G7U

  • OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR

  • 8頁

  • MOTOROLA   MOTOROLA

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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPXL5010/D
MPXL5010
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPXL5010 low profile series piezoresistive transducer is a state鈥搊f鈥搕he鈥揳rt
monolithic silicon pressure sensor designed for a wide range of applications, but
particularly those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining techniques,
thin鈥揻ilm metallization, and bipolar processing to provide an accurate, high level analog
output signal that is proportional to the applied pressure.
Features
鈥?/div>
Low Profile Package
鈥?/div>
5.0% Maximum Error over 0擄 to 85擄C
鈥?/div>
Ideally Suited for Microprocessor or Microcontroller鈥揃ased Systems
鈥?/div>
Patented Silicon Shear Stress Strain Gauge
鈥?/div>
Available in Differential and Gauge Configurations
鈥?/div>
Also Available in Unibody Package (see MPX5010 Data Sheet)
Application Examples
鈥?/div>
Hospital Beds
鈥?/div>
HVAC
鈥?/div>
Respiratory Systems
鈥?/div>
Process Control
VS
2
SERIES
OPERATING OVERVIEW
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 Volts Output
CASE 469鈥?1, STYLE 1
CASE 472B鈥?1, STYLE 1
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
3
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
4
Vout
PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS
CASE 472鈥?1, STYLE 1
Figure 1. Fully Integrated Pressure Sensor Schematic
1
PIN NUMBER
N/C
VS
Ground
Vout
5
6
7
8
N/C
N/C
N/C
N/C
2
MAXIMUM RATINGS(1)
Parametrics
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Pmax
Pburst
Tstg
TA
Value
75
100
鈥?40擄 to +125擄
鈥?40擄 to +125擄
Unit
kPa
kPa
擄C
擄C
3
4
NOTE: Pins 1, 5, 6, 7 and 8 are
internal device connections. Do not
connect to external circuitry or
ground.
1. TC = 25擄C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
REV 2
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1

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