MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX7050/D
50 kPa
High Zin, On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The new MPX7050 series pressure sensor incorporates all the innovative features of
Motorola鈥檚 MPX2000 series family including the patented, single piezoresistive strain
gauge (X鈥揹ucer) and on鈥揷hip temperature compensation and calibration. In addition, the
MPX7050 series has a high input impedance of typically 10 k鈩?for those portable, low
power and battery鈥搊perated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7050 series device is a logical and economical choice for
applications such as portable medical instrumentation, and remote sensing systems with
4 鈥?20 mAmp transmission.
Features
鈥?/div>
Temperature Compensated Over 0擄C to +85擄C
鈥?/div>
Unique Silicon Shear Stress Strain Gauge
鈥?/div>
Easy to Use Chip Carrier Package Options
鈥?/div>
Available in Differential and Gauge Configurations
鈥?/div>
Ratiometric to Supply Voltage
鈥?鹵
0.25% Linearity
Application Examples
鈥?/div>
Portable Medical Instrumentation
鈥?/div>
Remote Sensing Systems
Figure 1 shows a schematic of the internal circuitry on the stand鈥揳lone pressure
sensor chip.
VS
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
MPX7050
SERIES
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
BASIC CHIP
CARRIER ELEMENT
CASE 344鈥?5, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C鈥?1, STYLE 1
NOTE: Pin 1 is the notched pin.
HIGH
Zin
X鈥揹ucer
SENSING
ELEMENT
2
4
PIN NUMBER
Vout+
Vout鈥?/div>
1
2
Gnd
+Vout
3
4
VS
鈥揤out
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X鈥揹ucer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
REV 3
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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英文版
0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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0 to 100 kPa (0 to 14.5 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
MOTOROLA [...
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
MOTOROLA [...
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
MOTOROLA [...
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0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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英文版
0 to 700 kPa (0-100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
MOTOROLA [...
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