X鈥揹ucer鈩?/div>
SILICON
PRESSURE SENSORS
BASIC CHIP
CARRIER ELEMENT
CASE 867鈥?8, STYLE 1
PIN NUMBER
VS
3
1
2
3
Vout
Gnd
VS
4
5
6
N/C
N/C
N/C
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Pmax
Pburst
Tstg
TA
Value
4000
6000
鈥?40擄 to +150
鈥?40擄 to +125
Unit
kPa
kPa
擄C
擄C
1. TC = 25擄C unless otherwise noted. Maximum Ratings apply to Case 867鈥?8 only.
2. Extended exposure at the specified limits may cause permanent damage or degradation to the device.
3. This sensor is designed for applications where P1 is always greater than, or equal to P2.
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
(Replaces MPX5999)
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1