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MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

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by MPX5050/D

MPX5050

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPX5050 series piezoresistive transducer is a state鈥搊f鈥搕he鈥揳rt monolithic silicon

pressure sensor designed for a wide range of applications, but particularly those

employing a microcontroller or microprocessor with A/D inputs. This patented, single

element transducer combines advanced micromachining techniques, thin鈥揻ilm metalliza-

tion, and bipolar processing to provide an accurate, high level analog output signal that

is proportional to the applied pressure.

Features

鈥?/div>

2.5% Maximum Error over 0擄 to 85擄C

鈥?/div>

Ideally suited for Microprocessor or Microcontroller鈥揃ased Systems

鈥?/div>

Temperature Compensated Over 鈥?40擄 to +125

擄

C

鈥?/div>

Patented Silicon Shear Stress Strain Gauge

鈥?/div>

Durable Epoxy Unibody Element

鈥?/div>

Easy鈥搕o鈥揢se Chip Carrier Option

VS

3

SERIES

OPERATING OVERVIEW

INTEGRATED

PRESSURE SENSOR

0 to 50 kPa (0 to 7.25 psi)

0.2 to 4.7 Volts Output

BASIC CHIP CARRIER

ELEMENT

CASE 867鈥?8, STYLE 1

X鈥揹ucer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

2

GND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

1

Vout

DIFFERENTIAL PORT OPTION

CASE 867C鈥?5, STYLE 1

NOTE: Pin 1 is the notched pin.

PINS 4, 5 AND 6 ARE NO CONNECTS

PIN NUMBER

1

Vout

Grd

VS

4

5

6

N/C

2

3

Figure 1. Fully Integrated Pressure Sensor Schematic

MAXIMUM RATINGS(1)

Parametrics

Overpressure(2) (P1 > P2)

Burst Pressure(2) (P1 > P2)

Storage Temperature

Operating Temperature

Symbol

Pmax

Pburst

Tstg

TA

Value

200

700

鈥?40擄 to +125擄

Unit

kPa

擄C

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground.

1. TC = 25擄C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Senseon and X鈥揹ucer are trademarks of Motorola, Inc.

REV 3

Motorola Sensor Device Data

漏

Motorola, Inc. 1997

1

型號(hào)

版本

描述

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