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MPX5010GVSX Datasheet

  • MPX5010GVSX

  • INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 t...

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  • MOTOROLA   MOTOROLA

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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX5010/D
MPX5010
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPX5010 series piezoresistive transducer is a state鈥搊f鈥搕he鈥揳rt monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin鈥揻ilm metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
鈥?/div>
5.0% Maximum Error over 0擄 to 85擄C
鈥?/div>
Ideally Suited for Microprocessor or Microcontroller鈥揃ased Systems
鈥?/div>
Patented Silicon Shear Stress Strain Gauge
鈥?/div>
Durable Epoxy Unibody Element
鈥?/div>
Temperature Compensated over
BASIC CHIP
CARRIER ELEMENT
CASE 867鈥?8, STYLE 1
SERIES
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 V OUTPUT
*
40擄 to +125擄C
VS
3
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
DIFFERENTIAL
PORT OPTION
CASE 867C鈥?5, STYLE 1
PINS 4, 5 AND 6 ARE NO CONNECTS
PIN NUMBER
1
2
3
Vout
Gnd
VS
4
5
6
N/C
N/C
N/C
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Pmax
Pburst
Tstg
TA
Value
75
100
鈥?40 to +125
鈥?40 to +125
Unit
kPa
kPa
擄C
擄C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
1. TC = 25擄C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
REV 2
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1

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    0 to 50 kPa (0-7.25 psi) 60 mV FULL SCALE SPAN (TYPICAL)
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