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Manifold Sensing for Automotive Systems
PORT OPTION
CASE 867B鈥?4, STYLE 1
SERIES
INTEGRATED
PRESSURE SENSOR
20 to 250 kPa (2.9 to 36.3 psi)
0.2 to 4.9 V OUTPUT
BASIC CHIP
CARRIER ELEMENT
CASE 867鈥?8, STYLE 1
VS
3
PIN NUMBER
1
2
3
Vout
Gnd
VS
4
5
6
N/C
N/C
N/C
X鈥揹ucer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
2
GND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
Senseon and X鈥揹ucer are trademarks of Motorola, Inc.
REV 2
Motorola Sensor Device Data
漏
Motorola, Inc. 1997
1