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MPX2010 Datasheet

  • MPX2010

  • 10 KPA ON CHIP TEMPERATURE COMPENSATED CALIBRATED SILICON PR...

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MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX2010/D
10 kPa On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPX2010/MPXV2010G series silicon
piezoresistive pressure sensors provide a very
ac c ur ate and linea r v oltage output 鈥?direc tl y
proportional to the applied pressure. These sensors
house a single monolithic silicon die with the strain
gauge and thin鈥揻ilm resistor network integrated on
each chip. The sensor is laser trimmed for precise
span, offset calibration and temperature
compensation.
UNIBODY PACKAGE
MPX2010
MPXV2010G
SERIES
Motorola Preferred Device
MPX2010D
CASE 344
COMPENSATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
FULL SCALE SPAN: 25 mV
Freescale Semiconductor, Inc...
Features
鈥?/div>
Temperature Compensated over 0擄C to +85擄C
鈥?/div>
Ratiometric to Supply Voltage
鈥?/div>
Differential and Gauge Options
Application Examples
鈥?/div>
Respiratory Diagnostics
鈥?/div>
Air Movement Control
鈥?/div>
Controllers
鈥?/div>
Pressure Switching
Figure 1 shows a block diagram of the internal
circuitry on the stand鈥揳lone pressure sensor chip.
V
S
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
1
GND
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPX2010GP
CASE 344B
MPXV2010GP
CASE 1369
2
4
SENSING
ELEMENT
V
out+
V
out-
MPX2010DP
CASE 344C
MPXV2010DP
CASE 1351
PIN NUMBER
1
2
MPX2010GS
CASE 344E
3
4
Gnd
+V
out
V
S
鈥揤
out
5
6
7
8
N/C
N/C
N/C
N/C
Figure 1. Temperature Compensated and Calibrated
Pressure Sensor Schematic
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure side (P1) relative to the vacuum side (P2).
Similarly, output voltage increases as increasing vacu-
um is applied to the vacuum side (P2) relative to the
pressure side (P1).
NOTE: Pin 1 is noted by the notch in
the lead.
MPX2010GSX
CASE 344F
PIN NUMBER
Preferred
devices are Motorola recommended choices for future use and
best overall value.
1
2
Gnd
+V
out
3
4
V
S
鈥揤
out
REV 9
NOTE: Pin 1 is noted by the notch in
the lead.
Motorola Sensor Device Data
漏
Motorola, Inc. 2002
For More Information On This Product,
Go to: www.freescale.com
1

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