廬
ISO 9001 Registered
Process C3015
CMOS 3碌m
Digital
Electrical Characteristics
T=25
o
C Unless otherwise noted
N-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VT
N
緯
N
尾
N
Leff
N
鈭哤
N
BVDSS
N
VTF
P(N)
Minimum
0.6
42
2.85
12
12
Typical
0.8
0.6
47
3.2
0.7
Maximum
1.0
52
3.55
Unit
V
V
1/2
碌A(chǔ)/V
2
碌m
碌m
V
V
Comments
100x3碌m
100x3碌m
100x100碌m
100x3碌m
Per side
P-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VT
P
緯
P
尾
P
Leff
P
鈭哤
P
BVDSS
P
VTF
P(P)
Minimum
鈥?.6
13
2.85
鈥?2
鈥?2
Typical
鈥?.8
0.55
15
3.2
0.9
Maximum
鈥?.0
19
3.55
Unit
V
V
1/2
碌A(chǔ)/V
2
碌m
碌m
V
V
Comments
100x3碌m
100x3碌m
100x100碌m
100x3碌m
Per side
Diffusion & Thin Films
Well (field) Sheet Resistance
N+ Sheet Resistance
N+ Junction Depth
P+ Sheet Resistance
P+ Junction Depth
Gate Oxide Thickness
Gate Poly Sheet Resistance
Metal-1 Sheet Resistance
Passivation Thickness
Symbol
蟻
P-well(f)
蟻
N+
x
jN+
蟻
P+
x
jP+
T
GOX
蟻
POLY1
蟻
M1
T
PASS
Minimum
3.2
16
50
37.5
15
Typical
4.8
21
0.8
80
0.7
40.0
22
30
200+900
Maximum
6.5
27
100
42.5
30
60
Unit
K鈩?
鈩?
碌m
鈩?
碌m
nm
鈩?
m鈩?
nm
Comments
P-well
oxide+nit.
Capacitance
Gate Oxide
Metal-1 to Poly-1
Metal-1 to Silicon
Symbol
C
OX
C
M1P
C
M1S
Minimum
0.66
0.026
Typical
0.72
0.0523
0.030
Maximum
0.78
0.034
Unit
fF/碌m
2
fF/碌m
2
fF/碌m
2
Comments
漏 IMP, Inc.
89
1
2
